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Safety & Manufacturing Standards
CE Mark

The CE mark is a mandatory European marking for certain product groups to show they are in conformance with the essential health and safety requirements set out in European Directives. The letters "CE" are an abbreviation of Conformité Européenne (French for European conformity). The CE mark must be affixed to all machinery powered by electricity to be shipped to the European Union. The CE mark refers to the safety and not the quality of a product. Most quality markings are voluntary and opposite to the CE marking, which is mandatory for the products to which it applies.

Before the CE marking is affixed to a product, the essential requirements of the Machinery and Low Voltage European Directives must be met. Conformity to the Electro-magnetic Compatibility Directive may also be required. The conformity of the product must be proved by following a testing and/or certification procedure in addition to performing a risk analysis and compliance testing prior to a shipment. Once these procedures are completed, CCCi will issue a Certificate of Compliance. It is then up to the manufacturer to prepare the Declaration of Conformity (DOC) which is signed by a company officer, which asserts that the tool meets the appropriate directives.

SEMI® Guidelines and Standards S2

SEMI® (Semiconductor Equipment and Materials International) is a global organization comprised of members from all key sectors of the semiconductor industry. The Environmental Health and Safety (EHS) committee within SEMI's International Standards division develops standards and guidelines that are accepted worldwide as providing state-of-the-art process equipment safety to an industry that demands quality products. The primary guideline can be found in "SEMI S2, Safety Guidelines for Semiconductor Manufacturing Equipment."

The SEMI S2 guideline defines minimum performance-based safety requirements, the scope of which covers potential health and safety hazards such as mechanical, electrical, chemical, ionizing and non-ionizing radiation, seismic, ventilation, environmental and ergonomics. There are many additional SEMI guidelines that are referenced by or otherwise support SEMI S2. A partial list appears below:

  • S1-0308 - Safety Guideline for Equipment Safety Labels
  • S2-0706 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
  • S4-0304 - Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets
  • S5-0703 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves
  • S6-0707 - EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
  • S8-0308 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
  • S12-0298 - Guidelines for Equipment Decontamination
  • S13-0305 - Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use With Semiconductor Manufacturing Equipment
  • S14-0704 - Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
  • S16-0307 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Equipment Disposal
  • S17-0701 - Safety Guideline for Unmanned Transport Vehicle (UTV) Systems
  • S18-1102 - Environmental, Health, and Safety Guideline for Silane Family Gases Handling
  • S19-1102 - Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
  • S S22-0706a - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
  • S21-1106E - Safety Guideline for Worker Protection
  • S23-0705 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment
  • S24-0306 - Safety Guideline for Multi-Employer Work Areas
  • S25-0706 - Safety Guideline for Hydrogen Peroxide Storage & Handling Systems
  • S26-0308 - Environmental, Health, and Safety Guideline for FPD Manufacturing System


RoHS Directive

The European Union’s (EU) Restriction of Hazardous Substances (RoHS) Directive states that certain electrical and electronic equipment (EEE) materials for import into the EU cannot contain levels of lead (Pb), mercury (Hg), hexavalent chromium (Cr6+), polybrominated biphenyl (PBB) and polybrominated diphenyl ether (PBDE) at levels over 0.1%, or cadmium (Cd) at levels over 0.01%.

Many other countries are rapidly adopting regulations that emulate the EU Directive. Consequently, requirements concerning the reduction of these toxic substances in EEE products will affect everyone in the worldwide supply chain of EEE commerce.


The Waste Electrical and Electronic Equipment Directive (WEEE Directive) is the European Community directive 2002/96/EC on waste electrical and electronic equipment (WEEE) which, together with the RoHS Directive 2002/95/EC, became European Law in February 2003, setting collection, recycling and recovery targets for all types of electrical goods.

The directive imposes the responsibility for the disposal of waste electrical and electronic equipment on the manufacturers of such equipment. Those companies should establish an infrastructure for collecting WEEE in such a way that "users of electrical and electronic equipment from private households should have the possibility of returning WEEE at least free of charge". Also, companies are compelled to use the collected waste in an ecological-friendly manner, either by ecological disposal or by reuse/refurbishment of the collected WEEE.

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