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SEMI® Guidelines and Standards S2

SEMI® (Semiconductor Equipment and Materials International) is a global organization comprised of members from all key sectors of the semiconductor industry. The EHS (environmental health and safety) committee within SEMI's International Standards division develops standards and guidelines that are accepted worldwide as providing state-of-the-art process equipment safety to an industry that demands quality products. The primary guideline in is SEMI S2, Safety Guidelines for Semiconductor Manufacturing Equipment.

The SEMI S2 guideline defines minimum performance-based safety requirements. The scope of these requirements covers potential health and safety hazards such as mechanical, electrical, chemical, ionizing and non-ionizing radiation, seismic, ventilation, environmental and ergonomics. There are many additional SEMI guidelines that are referenced by or otherwise support SEMI S2. A partial list appears below.

Typical SEMI® Equipment Safety Guidelines:

  • S1-0308 - Safety Guideline for Equipment Safety Labels
  • S2-0706 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
  • S3-0306 -
  • S4-0304 - Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets
  • S5-0703 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves
  • S6-0707 - EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
  • S8-0308 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
  • S10-0307 -
  • S12-0298 - Guidelines for Equipment Decontamination
  • S13-0305 - Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use With Semiconductor Manufacturing Equipment
  • S14-0704 - Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
  • S16-0307 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Equipment Disposal
  • S17-0701 - Safety Guideline for Unmanned Transport Vehicle (UTV) Systems
  • S18-1102 - Environmental, Health, and Safety Guideline for Silane Family Gases Handling
  • S19-1102 - Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
  • S20-0303 -
  • S21-1106E - Safety Guideline for Worker Protection
  • S22-0706a - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
  • S23-0705 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment
  • S24-0306 - Safety Guideline for Multi-Employer Work Areas
  • S25-0706 - Safety Guideline for Hydrogen Peroxide Storage & Handling Systems
  • S26-0308 - Environmental, Health, and Safety Guideline for FPD Manufacturing System.
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